Noninvasive probing of high frequency signal in integrated circuits using electrostatic force microscope

Review of Scientific Instruments

Volumn 68, Issue 12, 1997, Pages 4506-4510

  Hong, J W ^a   Khim, Z G ^a   Hou, A S ^b   Park, Sang Il ^b  

^a Seoul National University   (South Korea)

^b Park Scientific Instruments   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC GENERATORS; ELECTROSTATICS; INTEGRATED CIRCUITS; MIXER CIRCUITS; PULSE MODULATION; SIGNAL DETECTION;

ELECTROSTATIC FORCE MICROSCOPE; ELECTROSTATIC FORCE MIXING; LOCK IN DETECTION METHOD; VOLTAGE SENSITIVITY;

ATOMIC FORCE MICROSCOPY;

EID: 0031367323     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1148421     Document Type: Article

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