Pulsed laser etching of GaN and AlN films

Materials Research Society Symposium - Proceedings

Volumn 482, Issue , 1997, Pages 1015-1020

  Chen, H ^a   Vispute, R D ^a   Talyansky, V ^a   Enck, R ^a   Ogale, S B ^a   Dahmas, T ^a   Choopun, S ^a   Sharma, R P ^a   Venkatesan, T ^a   Iliadis, A A ^a   Salamanca Riba, L G ^a   Jones, K A ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; DECOMPOSITION; DRY ETCHING; EXCIMER LASERS; NITRIDES; PULSED LASER APPLICATIONS; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING GALLIUM COMPOUNDS;

ALUMINUM NITRIDE; GALLIUM NITRIDE; PULSED LASER ETCHING;

SEMICONDUCTING FILMS;

EID: 0031365601     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)