Preparation of Si-based nanocrystalline SiC and its microstructure analyses

Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors

Volumn 18, Issue 10, 1997, Pages 731-733

  Li, Ningsheng ^a   Bao, Ximao ^a   Liao, Liangsheng ^a   Wu, Xiaohua ^a   Gao, Yihua ^a   Zhang, Ze ^a  

^a NANJING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ION IMPLANTATION; MICROSTRUCTURE; NANOSTRUCTURED MATERIALS; SEMICONDUCTING SILICON COMPOUNDS;

FOURIER TRANSFORM INFRARED SPECTROSCOPE; NANOCRYSTALLINE SILICON CARBIDE;

SILICON CARBIDE;

EID: 0031364902     PISSN: 02534177     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (13)