Silicon MOSFET scaling beyond 0.1 micron

Proceedings of the International Conference on Microelectronics

Volumn 1, Issue , 1997, Pages 11-18

  Iwai, Hiroshi ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; LSI CIRCUITS; SEMICONDUCTING SILICON;

SCALING METHOD;

MOSFET DEVICES;

EID: 0031364756     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)