Problems with the concept of thermal budget: Experimental demonstrations

Materials Research Society Symposium - Proceedings

Volumn 470, Issue , 1997, Pages 313-318

  Ditchfield, R ^a   Seebauer, E G ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DOPING (ADDITIVES); INTERFACES (MATERIALS); REACTION KINETICS; SEMICONDUCTING SILICON;

THERMAL BUDGET;

HEAT TREATMENT;

EID: 0031364628     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-470-313     Document Type: Conference Paper

References (13)