Influence of cavities and point defects on Cu gettering and B diffusion in Si

Materials Research Society Symposium - Proceedings

Volumn 469, Issue , 1997, Pages 457-462

  Wong Leung, J ^a   Williams, J S ^a   Petravic, M ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; BORON; COPPER; CRYSTAL IMPURITIES; DIFFUSION IN SOLIDS; DISSOLUTION; ION IMPLANTATION; POINT DEFECTS;

GETTERING; TRANSIENT ENHANCED DIFFUSION (TED);

SILICON WAFERS;

EID: 0031364380     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-469-457     Document Type: Conference Paper

References (12)