Study of repeatability, relative accuracy and lifetime of thermocouple instrumented calibration wafers for RTP

Materials Research Society Symposium - Proceedings

Volumn 470, Issue , 1997, Pages 17-22

  Vandenabeele, Peter ^a   Renken, Wayne ^a  

^a SensArray Corp   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

OPTICAL PROPERTIES; TEMPERATURE MEASUREMENT; THERMAL CYCLING;

RAPID THERMAL PROCESSING; THERMOCOUPLE INSTRUMENTED WAFERS;

THERMOCOUPLES;

EID: 0031364173     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-470-17     Document Type: Conference Paper

References (0)