Epitaxial CeO2 on silicon substrates and the potential of Si/CeO2/Si for SOI structures

Materials Research Society Symposium - Proceedings

Volumn 477, Issue , 1997, Pages 339-344

  Morshed, A H ^a   Liu, S X ^a   Leonard, R ^a   McIntosh, F G ^a   El Masry, N A ^a   Bedair, S M ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CERIUM COMPOUNDS; CHEMICAL VAPOR DEPOSITION; EPITAXIAL GROWTH; FILM GROWTH; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; SEMICONDUCTING SILICON; SEMICONDUCTOR GROWTH; SILICON ON INSULATOR TECHNOLOGY; SINGLE CRYSTALS; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY;

CERIA;

SEMICONDUCTING FILMS;

EID: 0031363451     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-474-339     Document Type: Conference Paper

References (5)