Microstructural gradients in thin hard coatings - Tailor-made

Surface and Coatings Technology

Volumn 97, Issue 1-3, 1997, Pages 308-312

  Fischer, K ^a   Oettel, H ^a  

^a TU BERGAKADEMIE FREIBERG   (Germany)

Author keywords

Reactive magnetron sputtering; Residual stress gradients; Texture gradients; Thin film growth; TiN coatings

Indexed keywords

FILM GROWTH; HARDNESS; MAGNETRON SPUTTERING; RESIDUAL STRESSES; THIN FILMS; TITANIUM NITRIDE; X RAY DIFFRACTION ANALYSIS;

THIN HARD COATINGS;

PROTECTIVE COATINGS;

EID: 0031363366     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00377-0     Document Type: Article

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