Silicon micromachined heat exchanger for MCMs with high temperature superconductors

Biennial University/Government/Industry Microelectronics Symposium - Proceedings

Volumn , Issue , 1997, Pages 154-158

  Price, David T ^a   Manu, George ^a   Rose, Kenneth ^a  

^a Center for Integrated Electronics   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYOGENICS; CRYSTAL ORIENTATION; FINS (HEAT EXCHANGE); HEAT RESISTANCE; HIGH TEMPERATURE SUPERCONDUCTORS; MICROMACHINING; SILICON WAFERS;

KOVAR FITTINGS;

MULTICHIP MODULES;

EID: 0031362625     PISSN: 07496877     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)