Using molecular dynamics simulations to investigate sputtering processes: An overview

Radiation Effects and Defects in Solids

Volumn 142, Issue 1-4, 1997, Pages 259-285

  Shapiro, Mark H ^a  

^a CALIFORNIA STATE UNIVERSITY   (United States)

Author keywords

Atom ejection; Ion beam sputtering; Molecular dynamics

Indexed keywords

COMPUTER SIMULATION; ION BEAMS; ION BOMBARDMENT; MATHEMATICAL MODELS; MOLECULAR DYNAMICS; PERSONAL COMPUTERS; RADIATION DAMAGE; TARGETS;

ION BEAM SPUTTERING;

SPUTTERING;

EID: 0031362489     PISSN: 10420150     EISSN: None     Source Type: Journal    
DOI: 10.1080/10420159708211613     Document Type: Review

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