Silicon-on-diamond MOS-transistors with thermally grown gate oxide

IEEE International SOI Conference

Volumn , Issue , 1997, Pages 30-31

  Edholm, Bengt ^a   Vestling, Lars ^a   Bergh, Mats ^a   Tiensuu, Stefan ^a   Soderbarg, Anders ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; HEAT RESISTANCE; ION IMPLANTATION; MOS DEVICES; PLASMA ETCHING; PROTECTIVE COATINGS; SEMICONDUCTING DIAMONDS; SILICON WAFERS;

SILICON ON DIAMOND (SOD) DEVICES;

SILICON ON INSULATOR TECHNOLOGY;

EID: 0031362342     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)