Polycrystalline silicon field emitter arrays by silicidation-sharpening technique at low temperature

Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC

Volumn , Issue , 1997, Pages 53-57

  Lee, Jin Ho ^a   Song, Yoon Ho ^a   Kang, Seung Youl ^a   Cho, Kyoung Ik ^a   Lee, Sang Yun ^a   Yoo, Hyung Joun ^a  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; DRY ETCHING; ELECTRON TUBE MANUFACTURE; LOW TEMPERATURE OPERATIONS; SILICON WAFERS; TITANIUM COMPOUNDS;

ETCH BACK PROCESS; SILICIDATION SHARPENING TECHNIQUES;

FIELD EMISSION CATHODES;

EID: 0031362209     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)