Challenges in achieving sub-100 nm MOSFETs

Proceedings of the Annual IEEE International Conference on Innovative Systems in Silicon

Volumn , Issue , 1997, Pages 52-60

  Tasch, Al F ^a  

^a UNIVERSITY OF TEXAS AT AUSTIN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS; ELECTRIC RESISTANCE; GATES (TRANSISTOR); HOT CARRIERS; INTEGRATED CIRCUIT LAYOUT; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR DOPING; SILICA;

LIGHTLY DOPED DRAIN (LDD);

MOSFET DEVICES;

EID: 0031362179     PISSN: 10632204     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)