Effect of hydrogen content on the crystalline quality of PECVD-deposited silicon for solar cells

Conference Record of the IEEE Photovoltaic Specialists Conference

Volumn , Issue , 1997, Pages 747-750

  Ito, Tadashi ^a   Imaizumi, Mitsuru ^a   Konomi, Ichiro ^a   Yamaguchi, Masafumi ^a  

^a Rd Management Section   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; CHEMICAL VAPOR DEPOSITION; COMPOSITION EFFECTS; CRYSTALLIZATION; DEHYDROGENATION; HYDROGEN; INTERFACES (MATERIALS); PHOTOLUMINESCENCE; POLYCRYSTALLINE MATERIALS; RAMAN SPECTROSCOPY; SEMICONDUCTING SILICON; SUBSTRATES;

ELASTIC RECOIL DETECTION TECHNIQUE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION (PECVD);

SILICON SOLAR CELLS;

EID: 0031361238     PISSN: 01608371     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)