Some practical considerations in selecting the automated material transport system for a semiconductor factory

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

Volumn , Issue , 1997, Pages 362-367

  Davis, J J ^a   Goel, P K ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPETITION; COST EFFECTIVENESS; DECISION MAKING; FACTORY AUTOMATION; MATERIALS HANDLING; PROCESS CONTROL; PRODUCTIVITY; QUALITY ASSURANCE; RELIABILITY; SILICON WAFERS;

AUTOMATED MATERIAL TRANSPORT SYSTEM; WAFER FAB;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0031361072     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)