On the development of surface temperatures in precision single-point diamond abrasion of semiconductors

International Communications in Heat and Mass Transfer

Volumn 24, Issue 8, 1997, Pages 1131-1140

  Abdel Aal, H A ^a   Smith, S T ^a   Patten, J A ^b  

^a University of North Carolina at Charlotte   (United States)

^b UNIVERSITY OF NORTH CAROLINA AT CHARLOTTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABRASIVES; DIAMOND CUTTING TOOLS; FRICTION; MACHINING; MATHEMATICAL MODELS; SEMICONDUCTING DIAMONDS; SILICON WAFERS; STRESS ANALYSIS; THERMAL CONDUCTIVITY OF SOLIDS;

MODIFIED JAEGER BLOK ANALYSIS; PRECISION SINGLE POINT DIAMOND ABRASION;

HEAT TRANSFER;

EID: 0031360248     PISSN: 07351933     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0735-1933(97)00107-3     Document Type: Article

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