Au/NiCr ohmic contacts to n-type 6H-silicon carbide

Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors

Volumn 18, Issue 9, 1997, Pages 718-720

  Zhang, Yuming ^a   Luo, Jingsheng ^a   Zhang, Yimen ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM MELTING; GOLD; NICKEL ALLOYS; OHMIC CONTACTS; SEMICONDUCTING SILICON COMPOUNDS; SILICON CARBIDE;

FOUR POINT PROBE METHOD; SINGLE N TYPE SILICON CARBIDE;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0031359562     PISSN: 02534177     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (7)