Sub-quarter micron silicon integrated circuits and single wafer processing

Proceedings of the International Conference on Microelectronics

Volumn 1, Issue , 1997, Pages 19-24

  Singh, R ^a  

^a CLEMSON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

PHOTONS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE;

RAPID PHOTOTHERMAL PROCESSING;

WSI CIRCUITS;

EID: 0031359422     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (22)