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Volumn 476, Issue , 1997, Pages 185-196
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Diagnostics, mechanisms of deposition, and process control of thin fluoropolymeric films in RF discharges
a
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPOSITION;
DEPOSITION;
ETCHING;
FLUORINE CONTAINING POLYMERS;
GLOW DISCHARGES;
MOLECULAR STRUCTURE;
PLASMA DIAGNOSTICS;
PROCESS CONTROL;
SPECTROSCOPIC ANALYSIS;
THIN FILMS;
ACTINOMETRIC SPECTROSCOPY;
PLASMA DEPOSITION;
PLASTIC FILMS;
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EID: 0031359356
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-476-185 Document Type: Conference Paper |
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Times cited : (1)
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References (10)
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