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Volumn 470, Issue , 1997, Pages 159-173
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Benefits and limitations of radiatively heated susceptors
a
a
SIEMENS AG
(Germany)
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
COMPUTATIONAL METHODS;
COMPUTER SIMULATION;
MONTE CARLO METHODS;
OPTICAL PROPERTIES;
SEMICONDUCTOR DEVICE MANUFACTURE;
RAPID THERMAL PROCESSING;
SUSCEPTORS;
SILICON WAFERS;
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EID: 0031359323
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (4)
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References (14)
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