Rapid vertical processor for fast-ramp small-batch diffusion and oxidation applications

Materials Research Society Symposium - Proceedings

Volumn 470, Issue , 1997, Pages 207-212

  Porter, Cole ^a   Laser, Allan ^a   Ratliff, Christopher ^a  

^a Silicon Valley Group   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION; OXIDATION; QUARTZ; THERMAL STRESS;

POWER DENSITY FURNACE; RAPID VERTICAL PROCESSORS;

HEAT TREATING FURNACES;

EID: 0031359321     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)