MOSFET-structured Si field emitter tip

Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC

Volumn , Issue , 1997, Pages 34-37

  Kanemaru, Seigo ^a   Ozawa, Ken ^a   Ehara, Keigo ^a   Hirano, Takayuki ^a   Itoh, Junji ^a  

^a ELECTROTECHNICAL LABORATORY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CURRENT CONTROL; ELECTRON TUBE MANUFACTURE; LSI CIRCUITS; MOSFET DEVICES; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE STRUCTURES;

SILICON FIELD EMITTER TIP;

FIELD EMISSION CATHODES;

EID: 0031359208     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)