Stability of field emission current for tetrahedral amorphous carbon films prepared by filtered vacuum arc deposition

Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC

Volumn , Issue , 1997, Pages 460-464

  Chung, Suk Jae ^a   Han, Eun Jung ^a   Moon, Jong Hyun ^a   Chen, Zhi Ying ^a   Liu, X ^a   Jang, Jin ^a  

^a Kyung Hee University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRIC CURRENTS; ELECTRON EMISSION; ELECTRONIC DENSITY OF STATES; ENERGY GAP; FIELD EMISSION CATHODES; SILICON WAFERS; VACUUM APPLICATIONS;

FIELD EMISSION CURRENT; FILTERED CATHODIC VACUUM ARC DEPOSITION; TETRAHEDRAL AMORPHOUS CARBON;

AMORPHOUS FILMS;

EID: 0031358984     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)