300mm fab automation technology options and selection criteria

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

Volumn , Issue , 1997, Pages 373-379

  Weiss, Mitchell ^a  

^a PRI Automation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMATION; COSTS; FABRICATION; PERFORMANCE; PRODUCTIVITY;

COST OF OWNERSHIP; MANUFACTURING LEAD TIME; OVERALL EQUIPMENT EFFECTIVENESS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0031358888     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)