Characterization of thin-film impact microactuators

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 62, Issue , 1997, Pages 87-91

  Hipwell, Roger L ^a   Muller, Richard S ^a   Pisano, Albert P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; MATHEMATICAL MODELS; THIN FILM DEVICES;

THIN FILM IMPACT MICROACTUATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0031358863     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (14)

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