FIB precision TEM sample preparation using carbon replica

Proceedings of the International Symposium on the Physical & Failure Analysis of Integrated Circuits, IPFA

Volumn , Issue , 1997, Pages 92-96

  Sheng, T T ^a   Goh, G P ^a   Tung, C H ^a   Wang, John L F ^a   Cheng, Jeng Kou ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; ION BEAMS; TRANSMISSION ELECTRON MICROSCOPY;

FOCUSED ION BEAMS (FIB);

SEMICONDUCTOR DEVICE TESTING;

EID: 0031358571     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)