A new perspective on the behavior of silane leaks in ventilated enclosures - Implications for the design of protection measures

SSA Journal: Journal of the Semiconductor Safety Association

Volumn 11, Issue 4, 1997, Pages 21-36

  Tamanini, Francesco ^a   Braga, Antonio C ^a  

^a FM Global Engineering and Research   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCIDENT PREVENTION; EXPLOSIONS; FIRE PROTECTION; IGNITION; VENTILATION; VENTILATION CODES;

VENTILATION REQUIREMENTS;

SILANES;

EID: 0031358392     PISSN: 1084578X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Review

References (11)

1. Rogelstad, T., Mosovsky, J., Valdes, J. and Lichtenvalner, C.P., "Silane Safety Improvement Project S71 Final Report," SEMATECH Report, Technology Transfer # 94062405A-ENG, July 28, 1994.
2. Tamanini, E and Chaffee, J. L., "Ignition Characteristics of Releases of 100% Silane," SEMATECH Report, Technology Transfer # 96013067A-ENG, March 7, 1996.
3. Tamanini, F. and Chaffee, J. L., "Effects of Leak Size and Geometry on the Consequences of Releases of 100% Silane (ESH B001)," SEMATECH Report, Technology Transfer # 96083168A-ENG, September 30, 1996.
4. FMRC Data Sheet 7-7/17-12, "Semiconductor Fabrication Facilities," January 1997 revision.
5. Uniform Fire Code, International Fire Code Institute, Vol. I, 1997.
6. UFC Standard 80-1, "Storage, Dispensing and Use of Silane and Its Mixtures," Uniform Fire Code, International Fire Code Institute, Vol. II, 1997.
7. Britton, L. G., "Combustion Hazards of Silane and Its Chlorides," Plant/Operations Progress, Vol. 9, No. 1, January 1990.
8. Cruice. W. J., "Effects of Releases of Silane Mixtures in Ambient Air," Hazards Research Corporation Report 4007, December 1978.
9. Cruice. W. J., "Leakage of Silane in Cabinets and Ducts," Hazards Research Corporation Report 5038, May 1982.
10. FMRC, "An Analysis of Experimental Results on the Venting of Silane/Air Explosions," Paper Presented at the SSA International Conference, Scottsdale, AZ, March 31-April 2, 1993.
11. Gordon, S. and McBride, B. J., "Computer Program for Calculation of Complex Chemical Equilibrium Compositions, Rocket Performance, Incident and Reflected Shocks, and Chapman-Jouget Detonations," NASA SP-273, March 1976.