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Volumn 7, Issue , 1997, Pages 13-18
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Eddy current flaw imaging using micro-sensor arrays
a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
COMPONENTS;
CRACK INITIATION;
DRY ETCHING;
EDDY CURRENT TESTING;
FATIGUE OF MATERIALS;
INSPECTION;
PHOTOLITHOGRAPHY;
SILICON WAFERS;
SUBSTRATES;
EDDY CURRENT FLAW IMAGING;
FLAW DETECTION;
KAPTON SUBSTRATES;
MICROSENSORS;
WET ETCHING;
SENSORS;
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EID: 0031356985
PISSN: None
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (2)
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References (7)
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