Low-k dielectric integration cost modeling

Materials Research Society Symposium - Proceedings

Volumn 476, Issue , 1997, Pages 177-182

  Korczynski, Ed ^a  

^a Solid State Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL POLISHING; DEPOSITION; LITHOGRAPHY; MATHEMATICAL MODELS; METALLIZING; ULSI CIRCUITS;

CHEMICAL MECHANICAL POLISHING; COST PER WAFER MODEL;

DIELECTRIC MATERIALS;

EID: 0031355335     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-476-177     Document Type: Conference Paper

References (9)