Comparison of stresses in Al lines under various passivations

Materials Research Society Symposium - Proceedings

Volumn 473, Issue , 1997, Pages 415-420

  Lee, S ^a   Bravman, J C ^a   Flinn, P A ^a   Marieb, T N ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ELECTROMIGRATION; FINITE ELEMENT METHOD; PASSIVATION; SCANNING ELECTRON MICROSCOPY; STRESS RELAXATION; THERMAL STRESS;

X RAY MEASUREMENTS;

ELECTRIC WIRING;

EID: 0031355197     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-473-415     Document Type: Conference Paper

References (12)