Fabrication of Si field emitters with gate using anodization

Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC

Volumn , Issue , 1997, Pages 78-82

  Higa, Katsuya ^a   Nishii, Kiyoaki ^a   Asano, Tanemasa ^a  

^a KYUSHU INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIC OXIDATION; CURRENT DENSITY; ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRON EMISSION; POROUS SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR JUNCTIONS; SINGLE CRYSTALS;

SILICON FIELD EMITTER ARRAYS;

FIELD EMISSION CATHODES;

EID: 0031355151     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)