Use of a cold gas plasma for the final processing of contamination-free TEM specimens

Materials Research Society Symposium - Proceedings

Volumn 480, Issue , 1997, Pages 225-234

  Fischione, P E ^a   Ringnalda, J ^a   Feng, Y ^a   Krekels, T ^a   Hayles, M ^a   Colijn, H O ^a   Mills, M J ^a   Wiezorek, J M ^a  

^a E A Fischione Instruments Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTAMINATION; SURFACE CLEANING; TRANSMISSION ELECTRON MICROSCOPY;

COLD GAS PLASMAS;

PLASMA APPLICATIONS;

EID: 0031354250     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-480-225     Document Type: Conference Paper

References (11)