The analysis and visualisation of metal microstructures

Advances in Engineering Software

Volumn 28, Issue 9, 1997, Pages 573-580

  Lees, A E U ^a  

^a DE MONTFORT UNIVERSITY   (United Kingdom)

Author keywords

ALGOR; Finite element analysis; LIGA; Micromechanics; Sensor

Indexed keywords

ACCELEROMETERS; COMPUTER SOFTWARE; ELECTROFORMING; FINITE ELEMENT METHOD; LITHOGRAPHY; MOLDING;

METAL MICROACCELEROMETERS; SOFTWARE PACKAGE ALGOR;

COMPOSITE MICROMECHANICS;

EID: 0031354158     PISSN: 09659978     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0965-9978(97)00045-8     Document Type: Article

References (6)

1. Tolfree, D., X-ray lithography and LIGA at Daresbury -Focus on Micromechanics, IOP Conference Proceedings, June 1993.
2. Lawes, R., Micromechanics: an Overview - Focus on Micromechanics, IOP Conference Proceedings, Central Microstructure Facility - Rutherford Appleton Laboratory, June 1993.
3. Etienne, S., Brennan, D. & Holcroft, B., Processes and their Implications for the Design of Micromachined Devices -Focus on Micromechanics, IOP Conference Proceedings, Central Research Laboratories Ltd, June 1993.
4. Brite-Euram Project 3360, Study of new materials and designs for advanced micro-motors.
5. Becker, E. W., et al. Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation, lithography, galvanoforming and plastic moulding (LIGA process). Microelectronic Engineering, 1986, 4, 35-56.
6. Penado, F. E. & Dropek, R. K., Hercules Aerosp Co, Div Design and Anal, Magna, UT, 84044. Univ Utah, Dept Mech Engn, Salt Lake City, UT, 84112, Designing with adhesives and sealant. Numerical Design and Analysis, 477-499.