Vacuum microelectronic pressure sensor with novel cathode

Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC

Volumn , Issue , 1997, Pages 648-652

  Xia, S H ^a   Liu, J ^a   Chen, S F ^a   Han, J H ^a   Cui, D F ^a  

^a INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ANODES; CATHODES; COMPUTER SIMULATION; ELECTRIC CURRENTS; ELECTRON TUBES; MICROELECTRONICS; SENSORS; SPURIOUS SIGNAL NOISE;

VACUUM MICROELECTRONIC (VME) PRESSURE SENSORS;

PRESSURE TRANSDUCERS;

EID: 0031353930     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)