Point defects migration and agglomeration in Si at room temperature: The role of surface and impurity content

Materials Research Society Symposium - Proceedings

Volumn 469, Issue , 1997, Pages 163-173

  Privitera, V ^a   Coffa, S ^a   Larsen, K Kyllesbech ^a   Libertino, S ^a   Mannino, G ^a   Priolo, F ^a  

^a CNR IMETEM   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

AGGLOMERATION; CRYSTAL IMPURITIES; CRYSTALLINE MATERIALS; DEEP LEVEL TRANSIENT SPECTROSCOPY; POINT DEFECTS; THERMAL DIFFUSION IN SOLIDS; THERMAL EFFECTS;

POINT DEFECTS MIGRATION;

SEMICONDUCTING SILICON;

EID: 0031353211     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-469-163     Document Type: Conference Paper

References (25)