Vibrational absorption from oxygen-hydrogen (Oi-H2) complexes in hydrogenated CZ silicon

Materials Science Forum

Volumn 258-263, Issue PART 1, 1997, Pages 283-288

  Pritchard, R E ^a   Ashwin, M J ^a   Newman, R C ^a   Tucker, J H ^a   Lightowlers, E C ^b   Binns, M J ^c   Falster, R ^c   McQuaid, S A ^c  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

^b KING'S COLLEGE LONDON   (United Kingdom)

^c MEMC Electronic Materials Inc   (United States)

Author keywords

Hydrogen; Infrared absorption; Oxygen; Si

Indexed keywords

ABSORPTION; ANNEALING; CRYSTAL DEFECTS; CRYSTAL GROWTH FROM MELT; DIFFUSION IN GASES; HYDROGEN BONDS; INFRARED SPECTROSCOPY; LATTICE VIBRATIONS; OXYGEN;

CZOCHRALSKI SILICON; VIBRATIONAL ABSORPTION;

SEMICONDUCTING SILICON;

EID: 0031349565     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: None     Document Type: Article

References (8)

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3. R.E. Pritchard, M.J. Ashwin, J.H. Tucker, R.C. Newman, E.C. Lightowlers, M.J. Binns, S.A. McQuaid, and R. Falster, submitted to Phys. Rev. B (1997).
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