Properties of a-Si:H and a-(Si,Ge):H solar cells prepared using ECR deposition techniques

Conference Record of the IEEE Photovoltaic Specialists Conference

Volumn , Issue , 1997, Pages 695-698

  Dalal, Vikram L ^a   Maxson, Tim ^a   Han, Kay ^a  

^a IOWA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; DEPOSITION; ELECTRON CYCLOTRON RESONANCE; ION BOMBARDMENT; PLASMA APPLICATIONS; SEMICONDUCTING SILICON; SEMICONDUCTING SILICON COMPOUNDS;

ELECTRON CYCLOTRON RESONANCE (ECR) PLASMA DEPOSITION;

SILICON SOLAR CELLS;

EID: 0031349249     PISSN: 01608371     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)