Structure, optical and electrical properties of pulsed laser deposited and ion beam deposited CNx films

Materials Research Society Symposium - Proceedings

Volumn 498, Issue , 1997, Pages 295-300

  Chan, K F ^a   Zhao, X A ^a   Ong, C W ^a  

^a HONG KONG POLYTECHNIC UNIVERSITY   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELECTRIC CONDUCTIVITY; GRAPHITE; ION BEAMS; LIGHT ABSORPTION; NITRIDES; PULSED LASER APPLICATIONS; STRUCTURE (COMPOSITION);

CARBON NITRIDE FILM; FILM STRUCTURE; ION BEAM DEPOSITION; PULSED LASER DEPOSITION;

SEMICONDUCTING FILMS;

EID: 0031349227     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-498-295     Document Type: Conference Paper

References (10)