SCOPUS 정보 검색 플랫폼

Volumn 13, Issue 6, 1997, Pages 499-502

Auger Depth Profiling of Carbonized SiC/Si Samples

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; COATED MATERIALS; COATING TECHNIQUES; SILICON SOLAR CELLS;

REACTION TIME; SILICON CARBIDE FILMS; SILICON SUBSTRATE;

SILICON CARBIDE;

EID: 0031349103 PISSN: 10050302 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (4)

References (16)

1
- 33747635774
- Y.Tawada, K.Tsugae, M.Kondo, H.O.Kamoto and Y.Hamakawa: J. Appl. Phys., 1982, 53, 527.
- (1982) J. Appl. Phys. , vol.53 , pp. 527
- Tawada, Y.¹ Tsugae, K.² Kondo, M.³ Kamoto, H.O.⁴ Hamakawa, Y.⁵

2
- 33747702675
- R.Dutta, R.K.Banerjee and S.S.Ultra: Phys. Solid State, 1983, 59, 581.
- (1983) Phys. Solid State , vol.59 , pp. 581
- Dutta, R.¹ Banerjee, R.K.² Ultra, S.S.³

3
- 0016911617
- L.Aggour, E.Fitzer, M.Heym and E.Ignatowitz: Thin Solid Films, 1977, 40, 97.
- (1977) Thin Solid Films , vol.40 , pp. 97
- Aggour, L.¹ Fitzer, E.² Heym, M.³ Ignatowitz, E.⁴

4
- 0018808545
- Y.Hirohato, M.Kobayashi, S.Maeda, K.Nakamura, M.Mori, K.Watanabe and T.Yamashin: Thin Solid Films, 1979, 63, 237.
- (1979) Thin Solid Films , vol.63 , pp. 237
- Hirohato, Y.¹ Kobayashi, M.² Maeda, S.³ Nakamura, K.⁴ Mori, M.⁵ Watanabe, K.⁶ Yamashin, T.⁷

5
- 0001460323
- Y.Matsumoto, G.Hirata, H.Takakura, H.Okamoto and Y.Hamakawa: J. Appl. Phys., 1990, 67, 6538.
- (1990) J. Appl. Phys. , vol.67 , pp. 6538
- Matsumoto, Y.¹ Hirata, G.² Takakura, H.³ Okamoto, H.⁴ Hamakawa, Y.⁵

6
- 33747705271
- W.S.Yoo and H.Matsunami: J. Appl. Phys., 1991, 70, 11.
- (1991) J. Appl. Phys. , vol.70 , pp. 11
- Yoo, W.S.¹ Matsunami, H.²

7
- 0025476318
- M.I.Chaudhry and R.L.Wright: J. Mater. Res., 1990, 5, 1595.
- (1990) J. Mater. Res. , vol.5 , pp. 1595
- Chaudhry, M.I.¹ Wright, R.L.²

8
- 0001072754
- J.A.Powell, D.J.Larkin, L.G.Matus, J.I.Bradshaw, L.Henderson, J.Yang and P.Pirouz: Appl. Phys. Lett., 1990, 56, 1442.
- (1990) Appl. Phys. Lett. , vol.56 , pp. 1442
- Powell, J.A.¹ Larkin, D.J.² Matus, L.G.³ Bradshaw, J.I.⁴ Henderson, L.⁵ Yang, J.⁶ Pirouz, P.⁷

9
- 0343229447
- eds. G.L.Harris and C.Y.W.Yang, Springer Publishers, Berlin
- Y.Onuma, F.Nagaune and K.Kamimura: Amorphous and Crystalline Silicon Carbide and Related Materials, eds. G.L.Harris and C.Y.W.Yang, Springer Publishers, Berlin, 1989.
- (1989) Amorphous and Crystalline Silicon Carbide and Related Materials
- Onuma, Y.¹ Nagaune, F.² Kamimura, K.³

10
- 0015079124
- J.A.Borders, S.T.Picraux and W.Bcezhold: Appl. Phys. Lett., 1971, 18, 509.
- (1971) Appl. Phys. Lett. , vol.18 , pp. 509
- Borders, J.A.¹ Picraux, S.T.² Bcezhold, W.³

11
- 0019080274
- P.Durupit, B.Canut, J.P.Ganthier, J.A.Roger and J.Pivot: Mater. Res. Bull., 1989, 15, 1557.
- (1989) Mater. Res. Bull. , vol.15 , pp. 1557
- Durupit, P.¹ Canut, B.² Ganthier, J.P.³ Roger, J.A.⁴ Pivot, J.⁵

12
- 0021464564
- F.Bozso, L.Muchlhoff, M.Trenary, W.J.Choyke and J.T.Vates: J. Vac. Sci. & Technol., 1984, A2, 1271.
- (1984) J. Vac. Sci. & Technol. , vol.A2 , pp. 1271
- Bozso, F.¹ Muchlhoff, L.² Trenary, M.³ Choyke, W.J.⁴ Vates, J.T.⁵

13
- 33747669221
- Y.Mizokawa, S.Nakanishi and S.Miyasae: Jpn. J. Appl. Phys., 1989, 28, 2570.
- (1989) Jpn. J. Appl. Phys. , vol.28 , pp. 2570
- Mizokawa, Y.¹ Nakanishi, S.² Miyasae, S.³

14
- 0026124361
- W.S.Yoo and H.Matsunami: Jpn. J. Appl. Phys., 1991, 30, 545.
- (1991) Jpn. J. Appl. Phys. , vol.30 , pp. 545
- Yoo, W.S.¹ Matsunami, H.²

15
- 33747656793
- W.F.Knippenberg and G.Verspui: Mater. Res. Bull., 1969, 4, 545.
- (1969) Mater. Res. Bull. , vol.4 , pp. 545
- Knippenberg, W.F.¹ Verspui, G.²

16
- 0026227102
- J.A.Savage: J. Cryst. Growth, 1991, 113, 698.
- (1991) J. Cryst. Growth , vol.113 , pp. 698
- Savage, J.A.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.