Metallic contaminants generation from tubing during start-up and following moisture upsets in HCl distribution systems

IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings

Volumn , Issue , 1997, Pages 77-80

  Anderson, N ^a   Vereecke, G ^a   Heyns, M M ^a   Espitalier Noel, P ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CONTAMINATION; HYDROCHLORIC ACID; MOISTURE; TUBES (COMPONENTS);

METALLIC CONTAMINATION; SURFACE CHEMISTRY;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0031348926     PISSN: 10788743     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)