New high speed, low cost, roll-to-roll antireflectivity coating technology

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 1997, Pages 309-313

  Ellison, T ^a   Dotter, B ^a   Izu, M ^a   Ovshinsky, S ^a  

^a Energy Conversion Devices Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIELECTRIC MATERIALS; ELECTRON CYCLOTRON RESONANCE; MICROWAVES; PLASMA APPLICATIONS; SILICA; SILICON CARBIDE; SILICON NITRIDE;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION (PECVD);

ANTIREFLECTION COATINGS;

EID: 0031348670     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)