New die-to-database mask inspection system with i-line optics for 256-Mbit and 1-Gbit DRAMs

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3096, Issue , 1997, Pages 415-422

  Tabata, Mitsuo ^a   Yamashita, Kyoji ^a   Tsuchiya, Hideo ^a   Nomura, Takehiko ^a   Inoue, Hiromu ^a   Watanabe, Tomohide ^a   Tojo, Toru ^a   Yoshino, Hisakazu ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DATABASE SYSTEMS; DEFECTS; MASKS; PERFORMANCE; PHOTOLITHOGRAPHY; RANDOM ACCESS STORAGE;

DRAM; I-LINE OPTICS;

INSPECTION;

EID: 0031347696     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)