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Volumn 97, Issue 1-3, 1997, Pages 603-610
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Structural investigation of Pt-Al2O3 co-sputtered nano-cermet films studied by small angle X-ray scattering, grazing angle X-ray reflectometry, TEM and AFM
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Author keywords
Atomic force microscopy; Cermet films; Cosputtering; Grazing angle X ray reflectometry; Small angle X ray scattering; Transmission electron microscopy
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Indexed keywords
ANNEALING;
ATOMIC FORCE MICROSCOPY;
CERMETS;
FILM GROWTH;
MORPHOLOGY;
NANOSTRUCTURED MATERIALS;
PLATINUM COMPOUNDS;
REFLECTOMETERS;
SPUTTERING;
THIN FILMS;
TRANSMISSION ELECTRON MICROSCOPY;
GRAZING ANGLE X RAY REFLECTOMETRY;
SMALL ANGLE X RAY SCATTERING;
CERAMIC COATINGS;
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EID: 0031347610
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(97)00321-6 Document Type: Article |
Times cited : (17)
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References (4)
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