Cleaning technology of PSM for sub-quarter-micron devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3096, Issue , 1997, Pages 84-92

  Handa, Hitoshi ^a   Takahashi, Masumi ^a   Miyahara, Yutaka ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CLEANING; QUARTZ; TECHNOLOGY;

SUB-QUARTER-MICRON DEVICES;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0031347470     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.277298     Document Type: Conference Paper

References (2)