Reduction of Airborne Molecular Contamination from fab construction materials

Institute of Environmental Sciences - Proceedings, Annual Technical Meeting

Volumn , Issue , 1997, Pages 279-284

  Gutowski, Thomas ^a   Oikawa, Hiroyuki ^a   Kobayashi, Sadao ^a  

^a Industrial Design Corp   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CLEAN ROOMS; CONTAMINATION; DEGASSING; GAS CHROMATOGRAPHY; IMPURITIES; MASS SPECTROMETRY; ORGANIC CHEMICALS; SILICON WAFERS;

AIRBORNE MOLECULAR CONTAMINATION (AMC); THERMAL DESORPTION;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0031346870     PISSN: 00739227     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)