Cycle time reduction for semiconductor wafer fabrication facilities

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

Volumn , Issue , 1997, Pages 418-423

  Meyersdorf, Doron ^a   Yang, Taho ^a  

^a Tefen Ltd   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPETITION; COSTS; ELECTRONICS INDUSTRY; FABRICATION; PERFORMANCE;

CYCLE TIME REDUCTION; OVERALL EQUIPMENT EFFECTIVENESS; SEMICONDUCTOR WAFER FABRICATION FACILITIES; SERVICE LEVEL; WORK IN PROCESS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0031346313     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)