Effective excursion detection and source isolation with defect inspection and classification

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

Volumn , Issue , 1997, Pages 146-149

  Shindo, Wataru ^a   Wang, Eric H ^a   Akella, Ram ^a   Strojwas, Andrzej J ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECTS; INSPECTION; MONITORING; SILICON WAFERS; VLSI CIRCUITS;

DEFECT CLASSIFICATION SCHEME; DEFECT SOURCE ISOLATION; EFFECTIVE EXCURSION DETECTION;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0031345898     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (1)