Wet chemical etching survey of III-nitrides

Materials Research Society Symposium - Proceedings

Volumn 483, Issue , 1997, Pages 265-270

  Cho, Hyun ^a   Hays, D C ^a   Vartuli, C B ^a   Pearton, S J ^a   Abernathy, C R ^a   MacKenzie, J D ^a   Ren, F ^a   Zolper, J C ^a  

^a UNIVERSITY OF FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; MOLECULAR BEAM EPITAXY; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING GALLIUM COMPOUNDS; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTOR GROWTH; SINGLE CRYSTALS;

WET CHEMICAL ETCHING;

NITRIDES;

EID: 0031345155     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-483-265     Document Type: Conference Paper

References (40)