Gate CD control for a 0.35 um logic technology

IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings

Volumn , Issue , 1997, Pages

  Boynton, Terence ^a   Yu, Warren ^a   Pak, James ^a  

^a Submicron Development Cent   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CLOSED LOOP CONTROL SYSTEMS; GATES (TRANSISTOR); LITHOGRAPHY; MICROPROCESSOR CHIPS; PARAMETER ESTIMATION; STATISTICAL PROCESS CONTROL;

GATE CRITICAL DIMENSION (CD) CONTROL;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0031344282     PISSN: 10788743     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (1)